SA-1212-M6-DN
Introduction
SA-1212-M6-DN ION PLANTING EQUIPMENT is a new arc ion plating machine specially designed for tool coating. The vacuum chamber is a vertical barrel with a front door. There are 6 source holes on chamber side for installation of arc evaporator. The bombardment power supply of SA-6T is a new product developed for tool coating purpose which has very high power that can increase plasma energy and effectively improves film hardness and adherence. Following are technical features of main parts.
1.Vacuum Chamber
The chamber is a vertical barrel, with inside diameter 700mm, and height 1000mm. Chamber cover can be disassemble and has a workpiece jig on it. There is a front door on chamber for loading and unloading of workpieces. There is one observation port on front door.
The chamber body and front door are whole water jacket structured and made of stainless steel.
There are 6 flange holes on Chamber barrel for placing arc evaporator. Besides, there is a square-shaped flange hole for connection with vacuum system. On barrel bottom, there are several flanges: one for installation of heater, two for gas supply and one for thermocouple.
Inside the barrel, there is a stainless neck bush to keep chamber clean. It is easy for change and convenient for regular clean.
The chamber is placed on a rectangle chassis which has gas supply system, side water cooling system, cables of system control and power supply. The chassis is made of carbon steel and painted with anti-corrosive paint.
2.Vacuum System
Vacuum system consists of following devices to meet requirement of pump down.
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Rotary vane vacuum pump 2X-30 1 set
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Rotary vane vacuum pump 2X-70 1 set
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Oil diffusion pump(ODP) k400T 1 set
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Roots pump ZJ-150 1 set
Besides pumps, the system also has valves, connecting popes, cryotrapping and instruments for measurement. Instruments for measurement is a thermocouple and ionization combined pressure gauge. Pressure range 103 Pa to 10-4Pa. It can switch from thermocouple gauge to ionization gauge automatically.
The above vacuum system meet the following needs:
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pump down time from 105Pa to 6.6X10-3Pa less than 20 min., cool condition, no loading
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Ultimate Pressure lower than 1.3X10-3Pa.
3. Gas supply system
Two or three kinds of gases can be inlet into the system for plating. Each inlet has necessary stop valve and control flow controller. Flow range is 0 to 500sccm for each inlet.
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automatic chamber pressure track and automatic adjustment of inlet
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flow mass display of each inlet gas
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no need for gas mixing cylinder, no adjustment delay
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capable of autometic or manual preset of mass proportion
4. Heating System
The system has a tube-shaped heater and connected power. The heater is 15kW , digital controlled, continuously adjustable which can precisely control the temperature.
5. Temperature measurement
Temperature measurement is by thermocouple thermosistor placed inside vacuum chamber. It can detect environment temperature of chamber. For detecting surface temperature of workpiece, customer can choose infrared thermosistor.
6. Workpiece Jig
Workpiece jig is placed on chamber cover. It can revolve at speed 4r/min and rotate at 15r/min. There are 6 or 8(out round) single-rotating hangers.
7.Evaporator and its power supply
6 sets of arc evaporator with automatic discharge devices, source target sized(100mmX40mm) 3 sets of power supplier for 6 evaporators.
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built-in electric field
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horizontal magnetic field of constant strength
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direct water cooling(or undirect water cooling)
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automatic discharge
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quick arc connecting function
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special arc maintenance circuit
8.Bombardment Power Supply(BPS) : 45KVA
This power supply is a powerful DC supply specially designed for tool coating. It has special protective circuit and arc extinction system.
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7.5KW for each target highly increases plasma energy to obtain .high qualitied tool coating film. In case of full loading with 6 targets burning , coating can carry on easily at bombardment voltage 1000V.
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specialized function wave output that extingish arc spark completely
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digital logical control
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voltage modulation of arc bombardment provides high field energy
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quick recover function available
9. Control System
There are two control systems for customer's choice: semi-automatic control or automatic control.
9.1 Semi-automatic control system consists of a relay matrix or a PLC system which has following function:
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preheating preset, machine on at specialized temperature
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automatic delay, machine off at specialized temperature
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frequencey converted speed adjustment
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automatic pumping down
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ODP temperature controlled at certain temperature, optimised ODP function and minimized return oil rate
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automatic tune to preset of BPS
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automatic evaporator failure indication
9.2 Automatic control system
The whole coating process is controlled by computer system.
Functions: system monitor, system diagnosis and coating management.
10. Working condition
10.1 Total power: 90KVA, 380V; maxium actual power: 70KVA
10.2 Environment :
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Total floor: 5m X 6m
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temperature 10 to 30
º C
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humidity below 80%
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compressed air: (5-7)?á105Pa(5-7kg/cm ²), air filter available
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independent ground line: ground connecting resistance below 5W
10.3 Net weight: 2 tons
10.4 Cooling water: 2 tons/hr, inlet temperature below 25
º C, pressure 2kg/cm ² .
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