Tools coating systems

Specially designed for tools coating,SINOARC ion plating equipment is an innovative cathodic arc plating system.Its bias power is an essential pillar developed for tools coating which powerfully increase plasma energy and effectively improves thin film hardness and adherence.

Features

1.Vacuum Chamber

The chamber of which cover can be disassemble and has a workpiece jig under it ,has a front door on chamber for loading and unloading workpieces, one peep hole located on the door.There are several ring-geometry docks on side chamber used to install tagets. The chamber body and front door are whole water jacket structured and made of stainless steel.There ,besides , is a vent for connecting to vacuum system. Under the bottom, one hole for installation of heater, two for gas supply ,one stainless neck bush for keeping chamber clean featured with easily disassemble and convenient for regular clean.The pedestal of chamber which contains gas supply system, side water cooling system, cables of system control and power supply. The pedestal is made of carbon steel and painted with corrosion resistance paint.

Chamber Detail

2.Vacuum System

Many techniques have been developed for the measurement of pressure and vaccum. In addition to pumps, the system also has valves,connecting pipes,cryotrapping and instruments used to measure pressure which is a thermocouple and ionization hybrid vaccum gauge.Hence, by combining several different types of gauge, it is possible to measure system pressure continuously from 10³pa down to 10^-4 pa.

Following devices are consisted to achieve requirement of pump down.

• Features:
  pump down time from 105Pa down to 6.6X10^-3Pa less than 20 min.
  cool condition, no loading Ultra-high vaccum down to 1.3X10-3Pa.

  Example reading: 1 Pa = 1 N/m²  = 10⁻⁵ bar  = 10.197×10⁻⁶ at  = 9.8692×10⁻⁶ atm  = 7.5006×10⁻³ torr  = 145.04×10⁻⁶ psi
  etc.

• automatic chamber pressure track

• automatic adjustment of  inject

• flow mass readout for each inject gas

• no need for gas mixing  cylinder, no adjustment delay

• capable of autometic or manual preset of mass proportion

4. Heating System

The system has a tube-shaped heater and connected power. The heater ,digital readout controlled, continuously adjustable ,has able to exactly control the temperature.

power detai

5. Temperature gauge

Measurement is fulfilled by thermocouple ,with sensor(thermosistor) placed inside vacuum chamber. It can sense environment temperature of chamber. For determining surface temperature of workpiece, IR(infrared) thermosistor is optional.

6. Workpiece Jig

Workpiece jig is fixed under chamber cover. It can revolve at speed 4r/min and rotate at 15r/min. There are 6 or 8(outter round) single-rotating hangers.

Rotating speed of jig is frequency conversion controlled and continuously adjustable.

The jig can start-up smoothly.

7.Evaporator and its power supply

6 sets of arc evaporator with automatic discharge devices, source target sized(100mmX40mm) 3 sets  of power supplier for 6 evaporators.

• built-in electric field

• horizontal magnetic field of constant strength

• direct water cooling(or undirect water cooling)

• automatic discharge

• quick arc connecting function

• special arc maintenance circuit

8.Bias Power

This power supply is a powerful DC supply specially designed for tools coating. It has special protective circuit and arc extinction  system.

• 7.5KW for each target highly increases plasma energy to obtain .high qualitied tools coating. In case of full loading with 6 targets burning , coating can carry on easily at bombardment voltage 1000V.

• eliminite arcs completely

• digital readout control

• voltage modulation of arc bombardment provides high field   energy

• quick recover function available

9. Control System

There are two control systems for customer's choice: semi-automatic control or automatic control.

9.1  Semi-automatic control system consists of a relay matrix or a PLC  system which has following function:

• preheating preset, machine on at specialized temperature

• automatic delay, machine off at specialized temperature

• frequencey converted speed adjustment

• automatic pumping down

• ODP temperature controlled at certain temperature, optimised ODP function and minimized return oil rate

• automatic tune to preset of BPS

• automatic evaporator failure indication

9.2  Automatic control system

The whole coating process is controlled by computer system.

Functions: system monitor, system diagnosis and coating process management.

10. Working condition

10.1  Total power: 90KVA, 380V; maxium actual power: 70KVA

10.2  Environment :

• Total floor: 5m X 6m

• temperature from 10( 50ºF) up to 30 º C( 86ºF)

• humidity below 80%

• compressed air: (5-7)?á105Pa(5-7kg/cm ²), air filter available

• independent ground line: ground connecting resistance below 5W

10.3  Net weight: 2 tons

10.4  Cooling water: 2 tons/hr, inlet temperature below 25 º C( 77ºF), pressure   2kg/cm ² .